Planarization method and photocurable composition

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12179231
APP PUB NO 20230330702A1
SERIAL NO

18338716

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Abstract

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A substrate surface planarization method includes an arranging step of arranging a liquid curable composition onto a substrate surface having unevenness, a waiting step of waiting until the surface of the layer of the liquid curable composition becomes smooth, and a light exposure step of applying light to cure the layer of the liquid curable composition in this order. The arranging step includes a first arranging step of arranging a layer made of a first liquid curable composition (A1) containing at least a polymerizable compound (a1), and a second arranging step of arranging droplets of a second liquid curable composition (A2) containing at least a polymerizable compound (a2) onto the layer made of the first liquid curable composition (A1) by dropping the droplets discretely.

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Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHAJAPAN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiba, Keiko Tochigi, JP 46 409
Ito, Toshiki Kanagawa, JP 132 711
Kiyohara, Naoki Tokyo, JP 23 81
Stachowiak, Timothy Austin, US 7 24
Yamashita, Keiji Tochigi, JP 75 311

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