Micromechanical component for a pressure and inertial sensor device

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12181356
APP PUB NO 20220326105A1
SERIAL NO

17641593

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Abstract

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A micromechanical component for a pressure and inertial sensor device. The component includes a substrate having an upper substrate surface; a diaphragm having an inner diaphragm side oriented towards the upper substrate surface and an outer diaphragm side pointing away from the upper substrate surface, the inner diaphragm side bordering on an inner volume, in which a reference pressure is enclosed, and the diaphragm being able to be warped using a pressure difference between a pressure prevailing on its outer diaphragm side and the reference pressure; and a seismic mass situated in the inner volume, a sensor electrode, which projects out on the inner diaphragm side and extends into the inner volume, being displaceable with respect to the substrate due to a warping of the diaphragm. A pressure and inertial sensor device, and a method of manufacturing a micromechanical component for a pressure and inertial sensor device, are also described.

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Patent Owner(s)

Patent OwnerAddress
ROBERT BOSCH GMBHPOSTFACH 30 02 20 STUTTGART 70442

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Classen, Johannes Reutlingen, DE 109 824
Reinmuth, Jochen Reutlingen, DE 150 702
Tebje, Lars Reutlingen, DE 27 152

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