Substrate processing apparatus for processing substrates

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12183602
APP PUB NO 20230395405A1
SERIAL NO

18235467

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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The disclosure relates to substrate processing apparatus, with a first and second reactor, each reactor configured for processing a plurality of substrates; and, a substrate handling robot constructed and arranged to transfer substrates between a substrate cassette at a substrate transfer position and the first and second reactor. The apparatus is constructed and arranged with a maintenance area between the first and second reactors to allow maintenance of the reactors from the maintenance area to both the first and second reactor.

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Patent Owner(s)

Patent OwnerAddress
ASM IP HOLDING B VALMERE

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
de, Ridder Chris Hoogland, NL 6 1659
Oosterlaken, Theodorus Oudewater, NL 9 1951

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