Selective molecular layer deposition of organic and hybrid organic-inorganic layers

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United States of America

PATENT NO 12191139
APP PUB NO 20220130663A1
SERIAL NO

17563024

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Abstract

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Embodiments of the disclosure relate to methods of selectively depositing organic and hybrid organic/inorganic layers. More particularly, embodiments of the disclosure are directed to methods of modifying hydroxyl terminated surfaces for selective deposition of molecular layer organic and hybrid organic/inorganic films. Additional embodiments of the disclosure relate to cyclic compounds for use in molecular layer deposition processes.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chakraborty, Tapash Maharashtra, IN 19 61
Goradia, Prerna Mumbai, IN 40 745
Visser, Robert Jan Menlo Park, US 131 2477

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