Laser processing apparatus and method of correcting converged spot position

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12191216
APP PUB NO 20220068729A1
SERIAL NO

17405330

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Abstract

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A laser processing apparatus includes a laser beam applying mechanism for applying a laser beam to a workpiece held by a holding mechanism while keeping a converged spot of the laser beam in the workpiece, and a temperature detector for detecting a temperature of the holding mechanism or a temperature of an actuator of a moving mechanism that moves the holding mechanism in a processing feed direction. The laser beam applying mechanism has a converged spot position adjusting unit. The controller, depending on a temperature change detected by the temperature detector, controls the converged spot position adjusting unit to establish a position of the converged spot of the laser beam in a thicknesswise direction of the workpiece.

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Patent Owner(s)

Patent OwnerAddress
DISCO CORPORATION13-11 OMORI-KITA 2-CHOME OTA-KU TOKYO 143-8580

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Odanaka, Kentaro Tokyo, JP 31 102

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