Solidly-mounted transversely-excited film bulk acoustic device and method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12191838
APP PUB NO 20220376669A1
SERIAL NO

17520688

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Abstract

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Methods of fabricating resonator and filter devices. A first conductor pattern formed on a front surface of a piezoelectric plate includes a first plurality of contact pads and an interdigital transducer (IDT). The IDT and the piezoelectric plate are configured such that a radio frequency signal applied to the IDT excites a shear primary acoustic mode within the piezoelectric plate. An acoustic Bragg reflector is between a substrate and a back surface of the piezoelectric plate, the acoustic Bragg reflector configured to reflect the shear primary acoustic mode. A second conductor pattern including a second plurality of contact pads is formed on a back surface of the interposer. The first plurality of contact pads is directly connected to respective contact pads of the second plurality of contact pads. A perimeter of the acoustic resonator chip is sealed to a perimeter of the interposer.

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Patent Owner(s)

Patent OwnerAddress
MURATA MANUFACTURING CO LTDNAGAOKAKYO-SHI KYOTO 617-8555

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Garcia, Bryant Mississauga, CA 127 2732
Hammond, Robert B Santa Barbara, US 72 1997
John, Jesson Dublin, US 26 1084
Plesski, Viktor Gorgier, CH 98 3449
Turner, Patrick San Bruno, US 141 3419
Yandrapalli, Soumya Lausanne, CH 38 1403
Yantchev, Ventsislav Sofia, BG 138 3509

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