Treatment machine, drive unit for a treatment machine and use of the treatment machine

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12196260
APP PUB NO 20210190131A1
SERIAL NO

17121577

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A treatment machine comprises a chamber for the treatment of one substrate or a plurality of substrates. A rotatably supported temperature-controlled shaft (30) defines a cylindrical, gas-tight hollow space. A heating arrangement (40, 50) is provided for electrically heating at least a part of the shaft (30) arranged in the chamber. The heating arrangement (40, 50) comprises an accommodation mandrel (40) for accommodating at least one electrical heating element (50), said accommodation mandrel (40) being arranged in a non-rotating manner and extending into the hollow space of the shaft (30). An outer surface of the accommodation mandrel (40) is spaced apart from an inner surface of the shaft (30) by a gap.

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Patent Owner(s)

Patent OwnerAddress
SINGULUS TECHNOLOGIES AG63796 KAHL AM MAIN

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Amrhein, Andreas Mespelbrunn, DE 1 0
Cord, Bernhard Alzenau, DE 11 29
Hofmann, Frank Wörth am Main, DE 79 352
Horlitz, Uwe Biebergemünd, DE 1 0
Kempf, Stefan Alzenau, DE 40 393
Schmitt, Karl Sailauf, DE 7 35

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