Measuring device and optical fiber strain measuring jig thereof

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United States of America

PATENT NO 12196629
APP PUB NO 20220244115A1
SERIAL NO

17586443

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Abstract

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A measuring device and an optical fiber strain measuring jig thereof appropriately measure an attraction force distribution on a wafer held by an electrostatic chuck. The measuring jig includes a substrate configured to be held by the electrostatic chuck; and an optical fiber including therein reflection elements capable of reflecting light having a wavelength corresponding to strain of the substrate due to stress, and fixed to one surface of the substrate in a state in which the reflection elements are disposed at plural positions, respectively, on the one surface of the substrate.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITEDAKASAKA BIZ TOWER 3-1 AKASAKA 5-CHOME MINATO-KU TOKYO 107-6325

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wu, Tong Miyagi, JP 171 1394

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