Plasma resistant arc preventative coatings for manufacturing equipment components

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12198903
APP PUB NO 20230187182A1
SERIAL NO

17548219

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Abstract

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A method includes depositing a first layer of a first material onto a surface of a chamber component of a processing chamber. The first material comprises a polymer, the polymer having a dielectric strength of at least 40 MV/m. The method further includes depositing a second layer of a second material onto the first layer. The second material comprises a first ceramic material impregnated into the first polymer or a second polymer. The method further includes depositing a third layer. The third layer is of a third material. The third material includes the first ceramic material or a second ceramic material. The third material does not adhere to the first polymer or the second polymer. The third material does adhere to the first ceramic material or the second ceramic material of the second layer.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Behnke, Joseph Frederick San Jose, US 15 19
Chang, Xue Yang San Jose, US 13 19
Coumou, David J Rochester, US 46 2043
Franklin, Timothy Joseph Campbell, US 41 60
Husain, Anwar Pleasanton, US 43 477
Sommers, Joseph Frederick Roseville, US 11 1
Sulyman, Alexander Alhajj Orinda, US 2 0

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