Cluster tool for production-worthy fabrication of Dolan bridge quantum Josephson junction devices

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12201037
APP PUB NO 20210135085A1
SERIAL NO

16675651

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Abstract

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A deposition system includes a deposition source and a scanning stage disposed within a deposition path of the deposition source. The scanning stage includes a support platform configured to support a wafer thereon, and a mechanical actuator coupled to the support platform. The mechanical actuator is configured to translate the support platform with respect to the deposition source. The deposition system includes a proximity mask disposed within the deposition path of the deposition source between the deposition source and the scanning stage, the proximity mask defining a slit. The deposition system includes a controller in communication with the scanning stage, the controller configured to control the mechanical actuator to translate the wafer with respect to the slit such that an angle of deposition remains substantially constant. In operation, the proximity mask prevents deposition source material having a trajectory that is out of alignment with the slit from contacting the wafer.

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Patent Owner(s)

Patent OwnerAddress
INTERNATIONAL BUSINESS MACHINES CORPORATIONNEW ORCHARD ROAD ARMONK NY 10504

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bedell, Stephen W Wappingers Falls, US 412 6001
Holmes, Steven J Ossining, US 316 5799
Li, Ning White Plains, US 758 4862
Sadana, Devendra K Pleasantville, US 897 10959

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