Device and method for moving an object into a processing station, conveying system and processing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12205838
APP PUB NO 20220336243A1
SERIAL NO

17621448

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A device for moving an object including a substrate through an open side of a processing station of a processing apparatus including a support, placeable at the processing station. The device includes a carrier, guided for movement relative to the support along a path predominantly directed in parallel to a reference axis in a reference co-ordinate system. The device includes a device for controlling movement of the carrier and driving the movement in an opposite direction along the path. The device includes a component for holding the object and a suspension mechanism with which the holding component is connected to the carrier. The suspension mechanism is arranged to guide movement of the holding component relative to the carrier along a holding component path. The device is arranged to drive the movement of the holding component along the holding component path. The holding component path is predominantly directed parallel to the reference axis.

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Patent Owner(s)

Patent OwnerAddress
ATOTECH DEUTSCHLAND GMBH10553 BERLIN

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Pretscher, Rüdiger Berlin, DE 2 1

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