Processing system, processing method, and storage medium

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12208405
APP PUB NO 20210086214A1
SERIAL NO

17016925

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Abstract

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According to one embodiment, a processing system includes a chamber, a supplier, a detector, and a controller. The chamber is configured to store a processing object inside. The supplier is configured to supply a plurality of particles and a gas inside the chamber. The detector is configured to detect a state of air flow in a vicinity of the processing object. The controller is configured to control the supplier based on a detection value from the detector. The controller determines generation of a vortex based on data regarding a steady state of the air flow and the detection value from the detector, and controls the supplier to stop supply of the plurality of particles when the generation of the vortex is determined.

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Patent Owner(s)

Patent OwnerAddress
KABUSHIKI KAISHA TOSHIBA1-1 SHIBAURA 1-CHOME MINATO-KU TOKYO 1050023 ?1050023

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Oda, Tatsuhiro Yokohama, JP 12 32

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