Microreplicated polishing surface with enhanced co-planarity

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12208483
APP PUB NO 20200164484A1
SERIAL NO

16636348

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Abstract

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An article includes a polishing layer that includes a plurality of raised cells separated by a plurality of channels. Each of the plurality of raised cells includes a microstructured working surface, a substantially vertical channel surface, and an offset surface between an edge of the working surface and an upper edge of the channel surface. The microstructured working surface includes a plurality of microstructures. Tops of the plurality of microstructures define a top plane and bases of the plurality of microstructures define a base plane. The substantially vertical channel surface defines a wall of a channel of the plurality of channels and the channel surface defines a channel plane. The offset surface includes a nonplanar portion of displaced material. The displaced material defines a displacement plane that is below the base plane or within a tolerance of the top plane.

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Patent Owner(s)

Patent OwnerAddress
3M INNOVATIVE PROPERTIES COMPANYP O BOX 33427 ST PAUL MN 55133-3427

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lehuu, Duy K Lake Elmo, US 18 144
Lueck, Brian W Houlton, US 24 188
Meyer, Kenneth A P Eagan, US 12 76
Muradian, David J St. Paul, US 3 0
Slama, David F City of Grant, US 50 990
Sullivan, John J Hudson, US 30 226

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