Shower head structure and plasma processing apparatus using the same

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United States of America

PATENT NO 12215422
APP PUB NO 20240084450A1
SERIAL NO

18516991

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Abstract

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A shower head structure and a plasma processing apparatus are provided. The shower head structure includes a plate body with a first zone and a second zone on a first surface. A plurality of first through holes are in the first zone, each of the first through holes having a diameter uniform with others of the first through holes. A plurality of second through holes are in the second zone. The first zone is in connection with the second zone, and the diameter of each of the first through holes is greater than a diameter of each of the second through holes. A plasma processing apparatus includes the shower head structure is also provided.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDHSINCHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Huan-Chieh Taichung, TW 9 9
Koai, Keith Kuang-Kuo Hsinchu County, TW 23 29
Lin, Jhih-Ren New Taipei, TW 3 4
Liu, Tai-Pin Hsinchu County, TW 2 4
Tsai, Shyue-Shin Tainan, TW 3 5

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