Apparatuses and methods for inspecting embedded features

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12216301
APP PUB NO 20230314682A1
SERIAL NO

17706654

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus includes a light source configured to emit light to a translucent material and an embedded feature disposed in the translucent material, a first linear polarizer configured to linearly polarize the emitted light, based on a first orientation of an optical axis of the first linear polarizer, and a second linear polarizer configured to filter the light that is reflected from the translucent material, from the light that is reflected from the embedded feature and the translucent material, based on a second orientation of an optical axis of the second linear polarizer. The apparatus further includes a sensor configured to receive the light reflected from the embedded feature, from which the light reflected from the translucent material is filtered, and capture an image of the embedded feature and the translucent material, based on the received light.

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Patent Owner(s)

  • INTEL CORP.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chesna, Jacob Phoenix, US 1 0
Fan, Fan Chandler, US 43 49
Mo, Jianyong Chandler, US 11 2
Zhang, Liang Chandler, US 689 3734

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