Reflective mask blank for EUV lithography, mask blank for EUV lithography, and manufacturing methods thereof

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United States of America

PATENT NO 12216397
APP PUB NO 20240045319A1
SERIAL NO

18380956

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A reflective mask blank for EUV lithography includes: a substrate; a multilayer reflective film for reflecting EUV light; and a phase shift film for shifting a phase of EUV light, the multilayer reflective film and the phase shift film formed on or above the substrate in this order. The phase shift film includes a layer 1 including ruthenium (Ru) and at least one selected from the group consisting of oxygen (O) and nitrogen (N). Among diffraction peaks derived from the phase shift film observed at 2θ: from 20° to 50° by out-of-plane XRD method, a peak having the highest intensity has a half value width FWHM of 1.0° or more.

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Patent Owner(s)

  • AGC INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akagi, Daijiro Tokyo, JP 24 20
Ishikawa, Ichiro Tokyo, JP 15 38
Kawahara, Hirotomo Tokyo, JP 23 78
Sasaki, Kenichi Tokyo, JP 142 1548
Uno, Toshiyuki Tokyo, JP 32 319

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