Coating method and coating apparatus

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United States of America

PATENT NO 12216406
APP PUB NO 20220371047A1
SERIAL NO

17623392

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Abstract

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A coating method of supplying a treatment solution to a substrate and coating the substrate with the treatment solution by a spin coating method. The method includes mixing a solvent for the treatment solution lower in surface tension than the treatment solution into the treatment solution concurrently with a start of supply of the treatment solution or later than the start of the supply of the treatment solution, and then supplying the treatment solution to the substrate.

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Patent Owner(s)

  • TOKYO ELECTRON LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hashimoto, Yusaku Kumamoto, JP 16 15
Kawakita, Masatoshi Kumamoto, JP 7 7
Yoshihara, Kosuke Kumamoto, JP 19 311

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