Method of cleaning a surface

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12217954
APP PUB NO 20220068634A1
SERIAL NO

17407839

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Importance

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Abstract

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Methods for cleaning a substrate are disclosed. The substrate comprises a dielectric surface and a metal surface. The methods comprise providing a cleaning agent to the reaction chamber.

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Patent Owner(s)

  • ASM IP HOLDING B.V.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Alessio, Verni Giuseppe Jodoigne, BE 37 979
Chandrasekaran, Anirudhan Herent, BE 13 4
Chiappe, Daniele Espoo, FI 21 21
Deng, Shaoren Ghent, BE 31 416
Dezelah, Charles Helsinki, FI 105 1634
Givens, Michael Oud-Heverlee, BE 47 5766
Illiberi, Andrea Leuven, BE 31 156
Iwashita, Shinya Helsinki, FI 22 36
Madhiwala, Viraj Helsinki, FI 16 4
Maes, Jan Willem Wilrijk, BE 111 19161
Sharma, Varun Helsinki, FI 103 2735
Tois, Eva Espoo, FI 50 6188
Tuominen, Marko Helsinki, FI 102 10592
Zhu, Chiyu Helsinki, FI 71 9572

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