Method and apparatus for treating substrate

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12217977
APP PUB NO 20220310415A1
SERIAL NO

17665233

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Abstract

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A substrate treating method includes moving a first component of a substrate treatment device to a preset position in response to a treating process of the substrate treatment device, detecting, by a plurality of position detection sensors, a position of the first component, vision-testing, by a vision sensor, a positional state of the first component, and determining an operational state of an error in the detection of the plurality of position detection sensors or a malfunction of the substrate treatment device based on a detection result obtained by the plurality of position detection sensor and a test result obtained by the vision sensor.

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Patent Owner(s)

  • SEMES CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kwon, Oh Yeol Cheonan-si, KR 2 0
Park, Soo Young Incheon, KR 85 897
Shin, Soo Yeon Suwon-si, KR 21 149

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