Etching device and etching method using the same

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12217978
APP PUB NO 20220223436A1
SERIAL NO

17501374

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An etching device includes a nozzle unit including at least one nozzle including an etching solution injection hole, an etching solution collection hole, and a sealing part. The etching solution injection hole is configured to provide an etching solution to an etching object, the etching solution collection hole is configured to collect the etching solution, and the sealing part surrounds the etching solution injection hole and the etching solution collection hole to prevent the etching solution from leakage.

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Patent Owner(s)

  • SAMSUNG DISPLAY CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Wonje Osan-si, KR 15 108
Lee, Duckjung Hwaseong-si, KR 68 215

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