Paddle configuration for a particle coating reactor

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12220678
APP PUB NO 20220032258A1
SERIAL NO

17073111

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Abstract

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A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a chemical delivery system, and a paddle assembly. The paddle assembly includes a rotatable drive shaft and a first plurality of paddles and a second plurality of paddles that extend radially from the drive shaft. The spacing, cross-sections, and oblique angles of the paddles are such that orbiting of the paddles causes the first plurality of paddles and the second plurality of paddles to displace substantially equal volumes in opposite directions in the lower portion of the stationary vacuum chamber.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Acharya, Sumedh Bangalore, IN 26 2025
Cambron, Mario San Jose, US 4 10
Desai, Govindraj Karnataka, IN 12 54
Frankel, Jonathan Los Gatos, US 41 1187
Krishnasamy, Sekar Bangalore, IN 15 124
Patel, Dakshalkumar Gujarat, IN 5 16
Patil, Ravindra Santa Clara, US 13 47
Truong, Quoc San Ramon, US 27 1046

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