Substrate cleaning system and substrate cleaning method

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United States of America

PATENT NO 12220732
SERIAL NO

17783069

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention relates to a substrate cleaning system and a substrate cleaning method for cleaning a substrate. The substrate cleaning system (50) includes a heater (51), a chemical-liquid diluting module (52), and a cleaning module. A temperature of the diluted-chemical-liquid mixed by the chemical-liquid diluting module (52) is determined to be higher than normal a temperature and lower than a glass transition point of a cleaning member. The cleaning member scrubs the substrate (W) with the diluted chemical liquid having the determined temperature supplied to the substrate (W).

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Patent Owner(s)

  • EBARA CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukaya, Koichi Tokyo, JP 30 241
Sato, Kohei Tokyo, JP 87 1213
Takahashi, Hiroki Tokyo, JP 515 2787

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