Metal complexes having triazenido ligands and uses thereof for depositing metals from the gas phase

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United States of America

PATENT NO 12221456
APP PUB NO 20200392171A1
SERIAL NO

16771867

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Abstract

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The invention relates to the use of a metal complex, which has at least one ligand of the formula R1—N3—R2, wherein R1 and R2 are hydrocarbon moieties, for depositing the metal or a compound of the metal from the gas phase. The invention further relates to methods for depositing metals from the metal complexes, and to metal complexes, substituted triazene compounds and to methods for the production thereof.

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Patent Owner(s)

  • UMICORE AG & CO KG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Pulz, Susanne Marburg, DE 1 0
Schroeder, Fabian Hameln, DE 2 3
Sundermeyer, Joerg Marburg, DE 20 75

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