Lithium niobate waveguide having weak phase drift

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United States of America

PATENT NO 12222590
APP PUB NO 20220308371A1
SERIAL NO

17638819

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Abstract

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A lithium niobate waveguide having weak phase drift includes a lithium niobate layer, a metal electrode, and a substrate layer. The lithium niobate layer includes a lithium niobate central ridge and lithium niobate extension surfaces extending towards two sides of the lithium niobate central ridge. A metal oxide layer is arranged on the upper surface of the lithium niobate central ridge. The substrate layer is located on the lower surface of the lithium niobate layer and is made of silicon, silicon dioxide, a multilayer material made of silicon and silicon dioxide or a multilayer material made of silicon dioxide, metal, and silicon, so as to further realize the purpose of inhibiting phase drift. Compared with other doped structures or other structures, the structure is simple in manufacturing method, and moreover, a very good phase drift suppression effect is achieved.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Liang, Hanxiao Shanghai, CN 18 0
Mao, Wenhao Shanghai, CN 16 0
Song, Shiwei Shanghai, CN 49 98
Song, Yipin Shanghai, CN 18 0
Sun, Weiqi Shanghai, CN 97 25
Wu, Haicang Shanghai, CN 16 0
Yu, Qingyang Shanghai, CN 16 4
Zhou, Yingcong Shanghai, CN 16 0

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