Cleaning device for cleaning electroplating substrate holder

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12226807
APP PUB NO 20220379356A1
SERIAL NO

17885360

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A cleaning device for removing contamination on a substrate holder used with an electroplating cell includes an arm, a cleaning agent supplier, a nozzle and a receiver. The cleaning agent supplier is coupled to the arm and configured to supply a cleaning agent. The nozzle is coupled to the cleaning agent supplier and configured to spray the cleaning agent onto the substrate holder to remove the contamination. The receiver is coupled to the arm and configured to receive the cleaning agent after the cleaning agent is sprayed onto the substrate holder.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kao, Chung-En Miaoli County, TW 30 428
Lu, Victor Y Foster City, US 35 690
Wang, Yu-Young New Taipei, TW 12 395

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