Operations of robot apparatuses within rectangular mainframes

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12226896
APP PUB NO 20230132174A1
SERIAL NO

17968870

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A robot apparatus is configured to extend a first end effector into a first process chamber and extend a second end effector into a second process chamber. The first process chamber and the second process chamber are separated by a first pitch. The robot apparatus is further configured to retract the first end effector and the second end effector into a rectangular mainframe while maintaining a distance between the substrates bounded by the first pitch throughout a retraction process, and fold the first end effector and the second end effector inward within a sweep diameter defined by a width of the rectangular mainframe.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cox, Damon K Jarrell, US 31 374
Farber, Matvey Redwood City, US 9 6
Hudgens, Jeffrey C San Francisco, US 151 2673
Thanu, Rajkumar Santa Clara, US 21 40

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