Laminate peeling method, laminate, and laminate production method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12227678
APP PUB NO 20220002591A1
SERIAL NO

17294129

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Abstract

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A laminate debonding method includes producing a laminate by joining a first substrate formed of a semiconductor-forming substrate to a second substrate formed of a support substrate which allows passage of infrared laser light, by the mediation of a first adhesive layer provided on the first substrate and a second adhesive layer provided on the second substrate, wherein the first adhesive layer is obtained by curing an adhesive (A) containing a component which is cured through hydrosilylation, and the second adhesive layer is obtained by use of an adhesive (B) formed of a polymer adhesive having an aromatic ring in at least one of a main chain and a side chain and which allows passage of infrared laser light; and irradiating the laminate with infrared laser light from a second substrate side for debonding the second substrate at the interface between the first and second adhesive layers.

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Patent Owner(s)

  • NISSAN CHEMICAL CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Moriya, Shunsuke Toyama, JP 31 10
Sawada, Kazuhiro Toyama, JP 29 166
Shinjo, Tetsuya Toyama, JP 72 321

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