Light irradiation type heat treatment apparatus

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12230518
APP PUB NO 20220051915A1
SERIAL NO

17516212

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A light diffusion plate made of quartz and provided with a plurality of recessed spherical surfaces is placed on an upper chamber window so as to be in opposed relation to a central portion of a semiconductor wafer. Flashes of light emitted from flash lamps and passing by the side of the light diffusion plate impinge upon a peripheral portion of the semiconductor wafer. On the other hand, flashes of light emitted from the flash lamps and entering the light diffusion plate are diverged by the recessed spherical surfaces. Part of the light entering the light diffusion plate is diffused toward the peripheral portion of the semiconductor wafer. As a result, this increases the amount of light impinging upon the peripheral portion of the semiconductor wafer, and decreases the amount of light impinging upon the central portion of the semiconductor wafer.

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Patent Owner(s)

  • SCREEN HOLDINGS CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nishide, Nobuhiko Kyoto, JP 12 55

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