Electrostatic chuck heater

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12230526
APP PUB NO 20220037188A1
SERIAL NO

17451504

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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An electrostatic chuck heater includes an electrostatic chuck including an electrostatic electrode embedded in a ceramic sintered body, a cooling member cooling the electrostatic chuck, and a heater layer disposed between the electrostatic chuck and the cooling member and including a plurality of metal layers embedded therein in multiple stages, the metal layers including resistance heating element layers. The heater layer includes a ceramic insulating layer with a thickness of 2 μm or more and 50 μm or less between the metal layers.

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Patent Owner(s)

  • NGK INSULATORS LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aikawa, Kenichiro Handa, JP 16 87
Kuno, Tatsuya Nagoya, JP 64 80
Takebayashi, Hiroshi Handa, JP 103 140

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