Capacitor and method for forming the same

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12232309
APP PUB NO 20220415891A1
SERIAL NO

17592751

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Abstract

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A capacitor includes cup-shaped lower electrodes disposed on a substrate, a capacitor dielectric layer conformally covering inner surfaces and outer surfaces of the cup-shaped lower electrodes, and a support layer disposed between outer surfaces of the cup-shaped lower electrodes to connect the cup-shaped lower electrodes. The capacitor further includes an annealed oxide layer, which is interposed between the inner surfaces of the cup-shaped lower electrodes and the capacitor dielectric layer, and is also interposed between a portion of the outer surfaces of the cup-shaped lower electrodes and the capacitor dielectric layer. A method for forming the capacitor is also provided.

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Patent Owner(s)

  • WINBOND ELECTRONICS CORP.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheng, Chun-Hung Taichung, TW 31 29
Chou, Wei-Chao Taichung, TW 2 1
Chuang, Wei-Chieh Taichung, TW 10 55
Hsiao, Yu-Ping Taichung, TW 2 1
Juan, Yen-Min Taichung, TW 1 0
Park, Cheol-Soo Taichung, TW 17 158

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