Substrate holder and substrate processing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12234094
APP PUB NO 20230018009A1
SERIAL NO

17811373

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A substrate holder includes a first boat configured to hold a substrate in a shelf-like manner, and a second boat coaxial with the first boat and provided to move up and down relative to the first boat. The second boat holds a substrate in a shelf-like manner. The first boat includes a first bottom plate and a first ceiling plate provided to face each other, a first support column connecting the first bottom plate and the first ceiling plate to each other, and a first placement surface on which the substrate is placed. The second boat includes a second bottom plate and a second ceiling plate provided to vertically face each other, a second support column connecting the second bottom plate and the second ceiling plate, and a second placement surface on which the substrate is placed. The second ceiling plate overlaps the first ceiling plate in a plan view.

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First Claim

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Patent Owner(s)

  • TOKYO ELECTRON LIMITED

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Shimada, Koichi Iwate, JP 30 146

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