Magnetic annealing equipment and method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12235045
APP PUB NO 20230304741A1
SERIAL NO

17656588

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The disclosure describes equipment for magnetic annealing of a substrate, the equipment including: an anneal chamber configured to heat and cool a substrate held at a soak location along a first direction in the anneal chamber, the anneal chamber including: a heater, a cooler, and a substrate lifter including a substrate holder, where the substrate holder is configured to support a substrate oriented such that the first direction is perpendicular to a major surface of the substrate; and a magnet assembly configured to establish a homogeneous zone in the anneal chamber, the soak location being within the homogeneous zone, the homogeneous zone including a region of magnetic field.

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Patent Owner(s)

  • TOKYO ELECTRON LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Abarra, Einstein Noel Tokyo, JP 42 197
Burkowicz, Bartlomiej Dublin, IE 1 1
Clarke, Barry Dublin, IE 7 7
Colgan, Ian Meath, IE 13 300
Domsa, Ioan Dublin, IE 10 298
Eyres, George Dublin, IE 7 293
Hurley, David Dublin, IE 18 68

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