Apparatus for treating substrate

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12237180
APP PUB NO 20220172966A1
SERIAL NO

17539070

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Abstract

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The inventive concept provides a substrate treating apparatus. The substrate treating apparatus comprises a first treating part performing, a liquid treatment on a plurality of substrates in a batch-type treating, method and a second treating part treating the substrates which have been treated at the first treating part, and performing, the liquid treatment or a drying treatment on a single substrate a single-type treating method.

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Patent Owner(s)

  • SEMES CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Kyu Hwan Chungcheongnam-do, KR 10 230
Choi, Jun Young Chungcheongbuk-do, KR 103 402

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