Support unit and substrate treating apparatus

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12237181
APP PUB NO 20230307260A1
SERIAL NO

17703255

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Importance

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Abstract

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The present invention provides a substrate treating apparatus. The substrate treating apparatus includes: a cup having a treatment space therein; a support unit configured to support a substrate within the treatment space, and including a rotatable support plate; and a liquid discharge unit configured to discharge a chemical liquid to the substrate supported by the support unit, in which the support unit includes: a plurality of pin members provided to the support plate to support the substrate placed on the support plate; and a discharge member coupled to the pin member to discharge charges to the air according to a rotation of the support plate, and the discharge member is provided as a conductive member.

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First Claim

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Patent Owner(s)

  • SEMES CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hwang, Ho Jong Hwaseong-si, KR 14 2
Kim, Do Yeon Yongin-si, KR 124 454
Yoon, Hyun Hwaseong-si, KR 47 183

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