Thin film capacitor and electronic circuit substrate having the same

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12237366
APP PUB NO 20230260713A1
SERIAL NO

18012820

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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To provide a thin film capacitor having high adhesion with respect to a circuit substrate. A thin film capacitor includes: a metal foil having a roughened upper surface; a dielectric film covering the upper surface of the metal foil and having an opening through which the metal foil is partly exposed; a first electrode layer contacting the metal foil through the opening; and a second electrode layer contacting the dielectric film without contacting the metal foil. An angle θa formed by the other main surface of the metal foil and a side surface thereof is more than 20° and less than 80°. The side surface is thus tapered at an angle of more than 20° and less than 80°, so that it is possible to suppress warpage and to enhance adhesion with respect to a multilayer substrate when the thin film capacitor is embedded in the multilayer substrate.

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Patent Owner(s)

  • TDK CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ishii, Daiki Tokyo, JP 36 60
Takahashi, Tetsuhiro Tokyo, JP 21 100
Yamashita, Yuki Tokyo, JP 64 292
Yano, Yoshihiko Tokyo, JP 72 1754
Yoshida, Kenichi Tokyo, JP 202 2251

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