Sensor and manufacturing method thereof

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12241860
APP PUB NO 20220120708A1
SERIAL NO

17499991

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Provided is a sensor including a substrate that includes a major surface, a sensor part that includes a gas flow path formed of a porous material, and at least one of a heater or a temperature sensor. The heater is capable of heating the sensor part, the temperature sensor is capable of measuring temperature of the sensor part, the sensor part and the at least one of the heater or the temperature sensor are stacked over the major surface, the at least one of the heater or the temperature sensor is an interconnect having forward tapered side surfaces, and the at least one of the heater or the temperature sensor includes a metal interconnect layer, and the forward tapered side surfaces of the interconnect overlap with the gas flow path in plan view of the major surface.

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Patent Owner(s)

  • ROHM CO. LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akasaka, Shunsuke Kyoto, JP 43 101
Amamoto, Yurina Kyoto, JP 6 0

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