Transversely-excited film bulk acoustic resonator with periodic etched holes

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12244299
APP PUB NO 20240186984A1
SERIAL NO

18417972

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Abstract

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There are disclosed acoustic resonators and method of fabricating acoustic resonators. An acoustic resonator includes a single-crystal piezoelectric plate having front and back surfaces, the back surface attached to a surface of a substrate except for portions of the piezoelectric plate forming a diaphragm spanning a cavity in the substrate. A conductor pattern on the front surface includes an interdigital transducer (IDT) with interleaved fingers of the IDT disposed on the diaphragm. A periodic array of holes is provided in the diaphragm.

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Patent Owner(s)

Patent OwnerAddress
MURATA MANUFACTURING CO LTDNAGAOKAKYO-SHI KYOTO 617-8555

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yantchev, Ventsislav Sofia, BG 138 3509

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