Method and system for providing ultrapure water with flexible lamp configuration

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12246979
APP PUB NO 20230312386A1
SERIAL NO

18205689

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Importance

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Abstract

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A method and system of providing ultrapure water for semiconductor fabrication operations is provided. The water is treated by utilizing a free radical scavenging system. The free radical scavenging system can utilize actinic radiation with a free radical precursor compound, such as ammonium persulfate. The ultrapure water may be further treated by utilizing ion exchange media and degasification apparatus. A control system can be utilized to regulate a continuously variable intensity of the actinic radiation.

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Patent Owner(s)

  • EVOQUA WATER TECHNOLOGIES LLC

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Coulter, Bruce Lee Rockford, US 14 182
Hall, Christopher Colorado Springs, US 88 1663

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