Integration of optoelectronic devices comprising lithium niobate or other Pockels materials

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12248206
APP PUB NO 20240142809A1
SERIAL NO

17975090

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Abstract

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A method of integrating an optoelectronic device comprising a Pockels material, such as lithium niobate (LiNbO3), includes forming an optoelectronic device layer over a semiconductor layer. The optoelectronic device layer includes a patterned optoelectronic device segment in an interlayer dielectric. A window is etched in the interlayer dielectric using the patterned optoelectronic device segment as a sacrificial etch stop. The patterned optoelectronic device segment is removed in the window. The optoelectronic device comprising the Pockels material is formed in place of the removed patterned optoelectronic device segment. The optoelectronic device comprising the Pockels material may be formed from an optoelectronic chiplet.

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Patent Owner(s)

  • NEWPORT FAB, LLC

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Martynov, Oleg Lebanon, US 7 2
Preisler, Edward San Clemente, US 41 82

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