Substrate cleaning device and substrate cleaning method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12251735
APP PUB NO 20220395866A1
SERIAL NO

17836009

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A substrate is held in a horizontal attitude by a substrate holder. At a processing position, a lower surface of the substrate held by the substrate holder is cleaned by a lower-surface brush. The lower-surface brush is cleaned by a brush cleaner at a waiting position that overlaps with the substrate held by the substrate holder in an up-and-down direction and is below a processing position. The lower-surface brush is lifted and lowered by a lower-surface brush lifting-lowering driver between the processing position and the waiting position.

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Patent Owner(s)

  • SCREEN HOLDINGS CO., LTD.

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ishii, Junichi Kyoto, JP 91 1350
Nakamura, Kazuki Kyoto, JP 71 166
Shinohara, Tomoyuki Kyoto, JP 22 107
Takahashi, Takuma Kyoto, JP 21 36

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