Pod cleaning process

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12251736
APP PUB NO 20220152658A1
SERIAL NO

17527214

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Importance

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Abstract

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Proposed is a POD cleaning process including: separating an introduced POD into an inner POD and an outer POD; cleaning a separation POD, which results from the separation, within a cleaning sub-chamber; drying the separation POD, which undergoes the cleaning, within a drying chamber; vacuum-processing the separation POD undergoing the drying; and assembling the inner POD and the outer POD that undergo the vacuum processing, in which the cleaning and the drying are separately performed.

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Patent Owner(s)

  • STI CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hur, Dong Geun Anseong-si, KR 4 8
Lee, Ki Man Anseong-si, KR 3 2
Park, Young Soo Anseong-si, KR 86 947

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