Method and apparatus for cleaning washing tool, substrate washing device, and method for manufacturing washing tool

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12251738
APP PUB NO 20240024928A1
SERIAL NO

18041579

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A cleaning apparatus performing cleaning treatment for a washing tool used for substrate washing by causing the washing tool to contact with a cleaning member while supplying a washing liquid to the washing tool includes a liquid extraction unit that extracts the washing liquid remaining in the washing tool or the washing liquid flowing out from the washing tool in the cleaning treatment, a color reaction unit that applies an iodine color reaction to the washing liquid extracted by the liquid extraction unit, and a determination unit that detects a coloration degree of the washing liquid subjected to the iodine color reaction and determines whether or not cleaning of the washing tool is completed based on the detected coloration degree.

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Patent Owner(s)

  • EBARA CORPORATION

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukunaga, Akira Tokyo, JP 78 669
Nakamura, Yumiko Tokyo, JP 28 74
Takatoh, Chikako Tokyo, JP 9 8
Uno, Megumi Tokyo, JP 5 2

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