Joined body, holding device, and electrostatic chuck

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12251923
APP PUB NO 20230311451A1
SERIAL NO

18043218

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Importance

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Abstract

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A joining layer of a joined body includes a joining material which contains, as a main component, a metal having a surface tension of 1000 mN/m or less at its melting point, and a metal layer which has a plurality of pores formed therein and in which at least some of the pores are impregnated with the joining material.

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Patent Owner(s)

Patent OwnerAddress
NITERRA CO LTDNAGOYA-SHI AICHI 461-0005

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arakawa, Ryuichi Nagoya, JP 9 28
Tanaka, Tomoo Nagoya, JP 40 200
Yoshimoto, Osamu Nagoya, JP 47 253

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