Chemical-mechanical polishing composition, rinse composition, chemical- mechanical polishing method, and rinsing method

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United States of America

PATENT NO 12252632
APP PUB NO 20220372329A1
SERIAL NO

17620181

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Abstract

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Provided is a chemical-mechanical polishing composition comprising an abrasive, a basic component, at least one compound selected from the group consisting of a quaternary polyammonium salt, a quaternary ammonium salt having 6 or more carbon atoms, and an alkylated polymer having an amide structure, and an aqueous carrier; a rinse composition comprising the at least one compound and an aqueous carrier, as well as a method of chemically-mechanically polishing a substrate, and a method of rinsing a substrate, in which the respective compositions are used.

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Patent Owner(s)

  • ENTEGRIS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kitamura, Hiroshi Tsu, JP 86 1057
Masuda, Tsuyoshi Tsu, JP 49 329
Matsumura, Yoshiyuki Nara, JP 49 414
Namiki, Akihisa Tsu, JP 4 0
Saito, Takeshi Tsu, JP 413 6864

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