Surface height measurement method using dummy disk

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12257666
APP PUB NO 20230415299A1
SERIAL NO

18466002

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Importance

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Abstract

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A method is provided and includes making a polishing table and a dummy disk rotate; bringing the dummy disk into contact with a table surface of the polishing table while a liquid is supplied to the table surface; measuring heights of the table surface at a plurality of measurement points while the dummy disk is moved on the table surface; and creating a table profile showing tilt of the table surface from measurement values of the heights of the table surface.

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Patent Owner(s)

Patent OwnerAddress
EBARA CORPORATIONOTA-KU TOKYO 144-8510

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Motoshima, Yasuyuki Tokyo, JP 43 346
Shinozaki, Hiroyuki Tokyo, JP 122 2620

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