Polishing composition, polishing method, and method for manufacturing substrate

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United States of America

PATENT NO 12258492
APP PUB NO 20240043720A1
SERIAL NO

18377466

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Abstract

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Provided are a polishing composition, a polishing method, and a method for manufacturing a substrate.

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Patent Owner(s)

Patent OwnerAddress
FUJIMI INCORPORATEDNISHIKASUGAI-GUN AICHI 452-8502

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Jingzhi Taiwan, CN 19 34

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