Adhesive for pellicle, pellicle for photo mask and method for manufacturing the same

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United States of America

PATENT NO 12258494
APP PUB NO 20230399552A1
SERIAL NO

18236515

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Abstract

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An adhesive for a pellicle, the adhesive including a phenol compound, the phenol compound having at least two hydroxyl groups, a polymer having a hydroxyl group or an amine group, and water.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG ELECTRONICS CO LTD129 SAMSUNG-RO YEONGTONG-GU SUWON-SI GYEONGGI-DO 16677

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jeong, Changyoung Yongin-si, KR 18 8
Kim, Mun Ja Hwaseong-si, KR 26 43

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