Control apparatus and control method

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United States of America Patent

PATENT NO 6258169
APP PUB NO 20010001386A1
SERIAL NO

09069141

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A control apparatus comprises a plurality of process units operating in accordance with parameters, a storing section for storing parameters relevant to processings by the process units, a touch screen for setting predetermined parameters for the process units, and a parameter administration section. The parameter administration section sends corresponding one of the stored parameters to one of the process units in reply to a request issued thereby, transfers the set parameter to the process unit, and rewrites the parameters stored in the storing section to the parameters set by the setting section.

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Patent Owner(s)

  • TOKYO ELECTRON LIMITED

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Asano, Kazuyuki Zama, JP 2 10

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