Importance

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Abstract

The holding unit of a vacuum machining device is capable of preventing a work piece from being excessively heated and capable of stably machining the work piece. The holding unit comprises: a holder for holding a work piece; a pressing member for pinching the work piece with the holder; and a heat insulating member being provided to the holder, the heat insulating member contacting the work piece to restrict heat conduction thereto.

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First Claim