US Patent Application No: 2001/0001,437

Number of patents in Portfolio can not be more than 2000

HOLDING UNIT VACUUM MACHINING DEVICE AND METHOD OF MANUFACTURING ELEMENT

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Abstract

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The holding unit of a vacuum machining device is capable of preventing a work piece from being excessively heated and capable of stably machining the work piece. The holding unit comprises: a holder for holding a work piece; a pressing member for pinching the work piece with the holder; and a heat insulating member being provided to the holder, the heat insulating member contacting the work piece to restrict heat conduction thereto.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
FUJITSU LIMITEDKAWASAKI16443

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
MIKAMI, MASAAKI KAWASAKI-SHI, JP 3 4
MIZOGUCHI, MASAYOSHI KAWASAKI-SHI, JP 1 0
SIMOJOH, SHUUEI KAWASAKI-SHI, JP 1 0
WATANABE, MASAAKI KAWASAKI-SHI, JP 19 136

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Patent Info (Count) # Cites Year
 
CANON ANELVA CORPORATION (1)
* 2012/0193,216 SUBSTRATE COOLING DEVICE, SPUTTERING APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE 1 2012
* Cited By Examiner