US Patent Application No: 2001/0001,652

Number of patents in Portfolio can not be more than 2000

PROCESS FOR TREATING FLOURINE COMPOUND-CONTAINING GAS

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Abstract

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A gas stream containing at least one fluorine compound selected from the group consisting of compounds of carbon and fluorine, compounds of carbon, hydrogen and fluorine, compounds of sulfur and fluorine, compounds of nitrogen and fluorine and compounds of carbon, hydrogen, oxygen and fluorine is contacted with a catalyst comprising at least one of alumina, titania, zirconia and silica, preferably a catalyst comprising alumina and at least one of nickel oxide, zinc oxide and titania in the presence of steam, thereby hydrolyzing the fluorine compound at a relatively low temperature, e.g. 200.degree.-800.degree. C., to convert the fluorine of the fluorine compound to hydrogen fluoride.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
HITACHI, LTD.TOKYO13938
SHUICHI KANNOCHIYODA-KU TOKYO0

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ARATO, TOSHIAKI HITACHINAKA-SHI, JP 16 113
AZUHATA, SHIGERU HITACHI-SHI, JP 47 692
IKEDA, SHINZO IBARAKI-KEN, JP 12 87
IRIE, KAZUYOSHI HITACHI-SHI, JP 16 39
KANNO, SHUICHI HITACHI-SHI, JP 32 95
TAMATA, SHIN IBARAKI-KEN, JP 50 229
YAMASHITA, HISAO HITACHI-SHI, JP 52 519
YASUDA, TAKESHI TOKYO, JP 34 197

Cited Art Landscape

Patent Info (Count) # Cites Year
 
BOC EDWARDS, INC. (1)
* 5,417,742 Removal of perfluorocarbons from gas streams 62 1993
 
HITACHI CONSTRUCTION MACHINERY CO., LTD. (2)
* 7,048,515 Hydraulic drive system and method using a fuel injection control unit 3 2002
* 7,020,553 Signal processing system for construction machine 10 2003
 
BOC GROUP, INC., THE (1)
* 5,468,459 Gas stream treatment method for removing per-fluorocarbons 3 1995
 
Nace Technology, Inc. (1)
* 5,328,556 Wafer fabrication 11 1992
 
HITACHI CHEMICAL COMPANY, LTD. (1)
* 7,061,081 Resin composition, heat-resistant resin paste and semiconductor device using them and method for manufacture thereof 9 2001
 
GUILD ASSOCIATES, INC. (5)
* 6,069,291 Catalytic process for the decomposition of perfluoroalkanes 23 1996
* 6,509,511 Process for the conversion of perfluoroalkanes, a catalyst for use therein and a method for its preparation 7 1998
* 6,426,443 Catalytic process for the decomposition of perfluoroalkanes 6 2000
* 6,673,326 Catalytic processes for the reduction of perfluorinated compounds and hydrofluorocarbons 9 2000
* 6,676,913 Catalyst composition and method of controlling PFC and HFC emissions 9 2002
 
BHT SERVICES PTE. LTD. (1)
* 2007/0212,288 EFFLUENT GAS STREAM TREATMENT SYSTEM HAVING UTILITY FOR OXIDATION TREATMENT OF SEMICONDUCTOR MANUFACTURING EFFLUENT GASES 4 2007
 
Dowa Mining Co., Ltd. (1)
* 6,022,489 Reagent for decomposing fluorocarbons 10 1997
 
HITACHI, LTD. (3)
* 5,877,391 Method for treating gas containing organohalogen compounds, and catalyst for decomposing the organohalogen compounds 25 1997
* 6,942,841 Process for treating fluorine compound-containing gas 2 2002
* 7,004,002 Rolling method for strip rolling mill and strip rolling equipment 3 2004
 
KANKEN TECHNO CO., LTD. (1)
* 5,649,985 Apparatus for removing harmful substances of exhaust gas discharged from semiconductor manufacturing process 42 1995
 
ABRAXIS BIOSCIENCE, LLC (1)
* 5,508,021 Non-fluorinated polymeric shells for medical imaging 124 1994
 
The United States of America as represented by the Secretary of the Navy (1)
* 5,451,378 Photon controlled decomposition of nonhydrolyzable ambients 17 1992
 
TEXAS INSTRUMENTS INCORPORATED (1)
* 4,807,016 Dry etch of phosphosilicate glass with selectivity to undoped oxide 143 1987
 
SHOWA DENKO K.K. (1)
* 6,855,305 Process for treating fluorine compound-containing gas 1 2003
 
ROSEN ENTERTAINMENT SYSTEMS, L.P. (1)
* 5,946,055 Display unit 107 1997
 
UNIVERSITY OF SOUTHERN CALIFORNIA (1)
* 4,982,039 Conversion of halogenated toxic substances 7 1988
 
UOP LLC (1)
* 5,396,022 Defluorination of alkane streams 7 1993
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (1)
* 2011/0160,046 CARBON NANOTUBES WITH NANO-SIZED PARTICLES ADHERED THERETO AND METHOD OF PREPARING SAME 0 2011
 
EDWARDS LIMITED (2)
7,824,637 Apparatus for treating a gas stream 1 2006
9,061,242 Apparatus for treating a gas stream 0 2010
 
Midwest Refrigerants, LLC (2)
8,128,902 Method for the synthesis of anhydrous hydrogen halide and anhydrous carbon dioxide 1 2011
8,043,574 Apparatus for the synthesis of anhydrous hydrogen halide and anhydrous carbon dioxide 1 2011
 
INEOS FLUOR HOLDINGS LIMITED (1)
* 6,921,519 Decomposition of fluorine containing compounds 3 2002
 
BHT SERVICES PTE. LTD. (1)
7,569,193 Apparatus and method for controlled combustion of gaseous pollutants 2 2003
 
MIDWEST INORGANICS LLC (1)
8,834,830 Method for the preparation of anhydrous hydrogen halides, inorganic substances and/or inorganic hydrides by using as reactants inorganic halides and reducing agents 0 2013
 
APPLIED MATERIALS, INC. (5)
* 6,905,663 Apparatus and process for the abatement of semiconductor manufacturing effluents containing fluorine gas 3 2000
7,736,599 Reactor design to reduce particle deposition during process abatement 1 2004
7,736,600 Apparatus for manufacturing a process abatement reactor 0 2006
7,700,049 Methods and apparatus for sensing characteristics of the contents of a process abatement reactor 2 2006
7,985,379 Reactor design to reduce particle deposition during process abatement 2 2007
 
SHOWA DENKO K.K. (5)
7,128,882 Method and apparatus for treating perfluorocompounds 0 2002
* 2002/0131,913 Method and apparatus for treating perfluorocompounds 2 2002
* 8,231,851 Method for processing perfluorocarbon, and apparatus therefor 2 2002
7,666,365 Perfluoride processing apparatus 0 2005
7,658,890 Perfluoride processing apparatus 0 2005
 
Kotusa, Inc. (1)
7,005,247 Controlled selectivity etch for use with optical component fabrication 1 2003
 
EBARA CORPORATION (3)
* 6,949,225 Method and apparatus for treating a waste gas containing fluorine-containing compounds 3 2000
* 6,602,480 Method for treating waste gas containing fluorochemical 11 2001
7,972,582 Method and apparatus for treating exhaust gas 0 2002
 
HITACHI, LTD. (2)
* 2002/0131,912 Method and apparatus for treating perfluorocompounds 1 2001
7,308,409 Process for treating perfluorides 0 2002
* Cited By Examiner