PROCESS FOR TREATING FLOURINE COMPOUND-CONTAINING GAS

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20010001652A1
SERIAL NO

09005006

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A gas stream containing at least one fluorine compound selected from the group consisting of compounds of carbon and fluorine, compounds of carbon, hydrogen and fluorine, compounds of sulfur and fluorine, compounds of nitrogen and fluorine and compounds of carbon, hydrogen, oxygen and fluorine is contacted with a catalyst comprising at least one of alumina, titania, zirconia and silica, preferably a catalyst comprising alumina and at least one of nickel oxide, zinc oxide and titania in the presence of steam, thereby hydrolyzing the fluorine compound at a relatively low temperature, e.g. 200.degree.-800.degree. C., to convert the fluorine of the fluorine compound to hydrogen fluoride.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
HITACHI, LTD.TOKYO13769
Shuichi KannoCHIYODA-KU TOKYO0

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ARATO, TOSHIAKI HITACHINAKA-SHI, JP 16 125
AZUHATA, SHIGERU HITACHI-SHI, JP 47 782
IKEDA, SHINZO IBARAKI-KEN, JP 12 107
IRIE, KAZUYOSHI HITACHI-SHI, JP 16 53
KANNO, SHUICHI HITACHI-SHI, JP 33 128
TAMATA, SHIN IBARAKI-KEN, JP 50 261
YAMASHITA, HISAO HITACHI-SHI, JP 54 590
YASUDA, TAKESHI TOKYO, JP 36 320

Cited Art Landscape

Patent Info (Count) # Cites Year
 
BOC EDWARDS, INC. (1)
* 5417742 Removal of perfluorocarbons from gas streams 68 1993
 
BHT SERVICES PTE. LTD. (1)
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The BOC Group, Inc. (1)
* 5468459 Gas stream treatment method for removing per-fluorocarbons 3 1995
 
Nace Technology, Inc. (1)
* 5328556 Wafer fabrication 11 1992
 
HITACHI CHEMICAL COMPANY, LTD. (1)
* 7061081 Resin composition, heat-resistant resin paste and semiconductor device using them and method for manufacture thereof 10 2001
 
GUILD ASSOCIATES INC. (5)
* 6069291 Catalytic process for the decomposition of perfluoroalkanes 23 1996
* 6509511 Process for the conversion of perfluoroalkanes, a catalyst for use therein and a method for its preparation 8 1998
* 6426443 Catalytic process for the decomposition of perfluoroalkanes 6 2000
* 6673326 Catalytic processes for the reduction of perfluorinated compounds and hydrofluorocarbons 11 2000
* 6676913 Catalyst composition and method of controlling PFC and HFC emissions 10 2002
 
DOWA MINING CO., LTD. (1)
* 6022489 Reagent for decomposing fluorocarbons 10 1997
 
HITACHI, LTD. (3)
* 5877391 Method for treating gas containing organohalogen compounds, and catalyst for decomposing the organohalogen compounds 26 1997
* 6942841 Process for treating fluorine compound-containing gas 2 2002
* 7004002 Rolling method for strip rolling mill and strip rolling equipment 3 2004
 
KANKEN TECHNO CO., LTD. (1)
* 5649985 Apparatus for removing harmful substances of exhaust gas discharged from semiconductor manufacturing process 42 1995
 
HITACHI CONSTRUCTION MACHINERY CO., LTD. (2)
* 7048515 Hydraulic drive system and method using a fuel injection control unit 4 2002
* 7020553 Signal processing system for construction machine 12 2003
 
UOP LLC (1)
* 5396022 Defluorination of alkane streams 9 1993
 
ABRAXIS BIOSCIENCE, LLC (1)
* 5508021 Non-fluorinated polymeric shells for medical imaging 148 1994
 
The United States of America as represented by the Secretary of the Navy (1)
* 5451378 Photon controlled decomposition of nonhydrolyzable ambients 17 1992
 
TEXAS INSTRUMENTS INCORPORATED (1)
* 4807016 Dry etch of phosphosilicate glass with selectivity to undoped oxide 215 1987
 
SHOWA DENKO K.K. (1)
* 6855305 Process for treating fluorine compound-containing gas 1 2003
 
UNIVERSITY OF SOUTHERN CALIFORNIA (1)
* 4982039 Conversion of halogenated toxic substances 7 1988
 
VOXX ELECTRONICS CORPORATION (1)
* 5946055 Display unit 110 1997
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (3)
* 2004/0241,069 Perfluoride processing apparatus 2 2004
* 2005/0271,568 Method and apparatus for treating a waste gas containing fluorine-containing compounds 5 2005
* 2011/0160,046 CARBON NANOTUBES WITH NANO-SIZED PARTICLES ADHERED THERETO AND METHOD OF PREPARING SAME 0 2011
 
BHT SERVICES PTE. LTD. (1)
7569193 Apparatus and method for controlled combustion of gaseous pollutants 4 2003
 
ADVANCED TECHNOLOGY MATERIALS, INC. (1)
* 2005/0249,643 Apparatus and process for the abatement of semiconductor manufacturing effluents containing fluorine gas 1 2005
 
MICRON TECHNOLOGY, INC. (1)
* 2010/0112,191 SYSTEMS AND ASSOCIATED METHODS FOR DEPOSITING MATERIALS 0 2008
 
Kotusa, Inc. (1)
7005247 Controlled selectivity etch for use with optical component fabrication 1 2003
 
EBARA CORPORATION (4)
* 6949225 Method and apparatus for treating a waste gas containing fluorine-containing compounds 4 2000
* 6602480 Method for treating waste gas containing fluorochemical 11 2001
7972582 Method and apparatus for treating exhaust gas 0 2002
* 2004/0191,146 Method and apparatus for treating exhaust gas 13 2004
 
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (1)
* 2009/0155,154 APPARATUS FOR DECOMPOSING SUFLUR-FLUORINE-CONTAINING COMPOUND AND METHOD THEREOF 0 2007
 
HITACHI, LTD. (4)
* 2002/0131,912 Method and apparatus for treating perfluorocompounds 1 2001
7308409 Process for treating perfluorides 0 2002
* 2003/0054,640 Process for treating perfluorides 1 2002
* 2006/0122,793 Process for treating perfluorides 0 2006
 
EDWARDS LIMITED (2)
7824637 Apparatus for treating a gas stream 1 2006
9061242 Apparatus for treating a gas stream 0 2010
 
Midwest Refrigerants, LLC (3)
* 2010/0286,463 Process and Apparatus for the Pyrolytic Conversion of Organic Halides to Hydrogen Halides 3 2009
8128902 Method for the synthesis of anhydrous hydrogen halide and anhydrous carbon dioxide 1 2011
8043574 Apparatus for the synthesis of anhydrous hydrogen halide and anhydrous carbon dioxide 1 2011
 
INEOS FLUOR HOLDINGS LIMITED (1)
* 6921519 Decomposition of fluorine containing compounds 3 2002
 
MIDWEST INORGANICS LLC (1)
8834830 Method for the preparation of anhydrous hydrogen halides, inorganic substances and/or inorganic hydrides by using as reactants inorganic halides and reducing agents 0 2013
 
APPLIED MATERIALS, INC. (12)
* 6905663 Apparatus and process for the abatement of semiconductor manufacturing effluents containing fluorine gas 4 2000
7736599 Reactor design to reduce particle deposition during process abatement 1 2004
7736600 Apparatus for manufacturing a process abatement reactor 0 2006
7700049 Methods and apparatus for sensing characteristics of the contents of a process abatement reactor 2 2006
* 2007/0190,469 METHODS AND APPARATUS FOR PREVENTING DEPOSITION OF REACTION PRODUCTS IN PROCESS ABATEMENT REACTORS 5 2006
* 2007/0172,398 METHODS AND APPARATUS FOR MANUFACTURING A PROCESS ABATEMENT REACTOR 11 2006
* 2007/0169,889 METHODS AND APPARATUS FOR SELECTIVELY COUPLING PROCESS TOOLS TO ABATEMENT REACTORS 6 2006
* 2007/0172,399 METHODS AND APPARATUS FOR SENSING CHARACTERISTICS OF THE CONTENTS OF A PROCESS ABATEMENT REACTOR 4 2006
* 2008/0003,158 METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER 4 2007
7985379 Reactor design to reduce particle deposition during process abatement 2 2007
* 2009/0010,816 APPARATUS AND METHOD FOR CONTROLLED COMBUSTION OF GASEOUS POLLUTANTS 6 2007
* 2007/0274,876 REACTOR DESIGN TO REDUCE PARTICLE DEPOSITION DURING PROCESS ABATEMENT 24 2007
 
SHOWA DENKO K.K. (6)
7128882 Method and apparatus for treating perfluorocompounds 2 2002
* 2002/0131,913 Method and apparatus for treating perfluorocompounds 2 2002
* 8231851 Method for processing perfluorocarbon, and apparatus therefor 4 2002
* 2003/0049,190 Method for processing perfluorocarbon, and apparatus therefor 4 2002
7666365 Perfluoride processing apparatus 0 2005
7658890 Perfluoride processing apparatus 0 2005
 
Unimicron Technology Corp. (1)
* 2006/0113,658 Substrate core and method for fabricating the same 0 2005
 
LIGHTCROSS, INC. (1)
* 2002/0158,046 Formation of an optical component 0 2001
* Cited By Examiner